It is reported that the new generation EUV lithography machine from ASML is now ready for mass production.

According to media reports, the Dutch lithography equipment manufacturer ASML's executives stated that the company's new generation extreme ultraviolet lithography machine is ready for use, and chip manufacturers can now begin using it for mass production. The unit price of this equipment is approximately 400 million US dollars, which is double the price of the first generation EUV machine. ASML's Chief Technology Officer, Marco Pieters, said that the equipment has processed about 500,000 silicon wafers so far, with very low downtime and pattern accuracy reaching production standards.